In the field of gas sensors and high temperature flow sensors, thicNYfilm based structures play a Ney role, ... heater power for alumina meso hotYplates [14,15].
Available online at www.sciencedirect.com
ScienceDirect Procedia Engineering 87 (2014) 1505 – 1508
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1877-7058 © 2014 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license
(http://creativecommons.org/licenses/by-nc-nd/3.0/). Peer-review under responsibility of the scientific committee of Eurosensors 2014 doi:10.1016/j.proeng.2014.11.584
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