Characterization of Au/Zn/Au and Au/Ti/Pt/Au contacts ...

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(b) Agere systems, 9333 S. John Young Parkway, Orlando, FL 32819 ... film was deposited on the p-InGaAs contact layer (1x1019 cm-3) followed by alloying or .... [7] L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin and F.A. Stevie, Mater.
Characterization of Au/Zn/Au and Au/Ti/Pt/Au contacts to p-type InP J.S. Huang,(a) P. Thai,(a) A. Konkar,(a) M. Geva,(a) L. Cote,(a) C.B. Vartuli,(b) R.B. Irwin (b) and Tricia Clark(c) (a) Agere systems, 2015 W. Chestnut St., Alhambra, CA 91803 (b) Agere systems, 9333 S. John Young Parkway, Orlando, FL 32819 (c) Agere Systems, 2525 N. 12th Street, Reading, PA 19612 Abstract Au/Zn/Au and Au/Ti/Pt/Au metal films before and after alloy/anneal were extensively characterized by scanning electron microscopy (SEM), scanning transmission electron microscopy (STEM), cross section transmission electron microscopy (XTEM) and Rutherford backscattering spectrometry (RBS). Film thickness measured by XTEM showed