In-Situ Expitaxial Silicon-Oxide-Doped Polysilicon Structures for MOS ...

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EDL/7/10/10940. In-Situ Epitaxial Silicon-Oxide-Doped Polysilicon. Structures for MOS Field-Effect Transistors. J. C. Sturm. C. M. Gronet. C. A. King. S. D. Wilson.