Metal-Organic Chemical Vapor Deposition of ...

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Symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A. ... please contact the Copyright Clearance Center, Salem, Massachusetts.
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUME 335

Metal-Organic Chemical Vapor Deposition of Electronic Ceramics Symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.

EDITORS:

Seshu B. Desu Virginia Polytechnic Institute and State University Blacksburg, Virginia, U.S.A.

David B. Beach IBM T.J. Watson Research Center Yorktown Heights, New York, U.S.A.

Bruce W. Wessels Northwestern University Evanston, Illinois, U.S.A.

Suleyman Gokoglu NASA Lewis Research Center Cleveland, Ohio, U.S.A.

IMIRISI

MATERIALS RESEARCH SOCIETY Pittsburgh, Pennsylvania

PREFACE ............... . ACKNOWLEDGMENTS ....... MATERIALS RESEARCH SOCIETY PART I: MOCVD 0

*PLASMA ENHANCED METAL-ORQ DEPOSITION OF GERMANIUM Nil David M.Hoffman, Sri Praust Demetre J. Economou, Jia-Rui *RECENT ADVANCES IN THE CVD Roy G. Gordon Single article reprints from this publication are available through University Microfilms Inc., 300 North Zeeb Road, Ann Arbor, Michigan 48 !06 CODEN: MRSPDH Copyright 1994 by Materials Research Society. All rights reserved.

LPCVD OF lnN ON GaAs (l lO) USIN WITH Si(IOO) RESULTS ...... . Y. Bu and M.C.Lin PART II:

1

This book has been registered with Copyright Clearance Center, Inc. For further information, please contact the Copyright Clearance Center, Salem, Massachusetts.

EPITAXIAL GROWTH OF �1-.Sr 1 Y�Cu O.,_ ELECTRODE BY PE-M C.S. 't:hern, S. Liang, Z.Q. S and B.H. Kear

Published by:

LOW TEMPERATURE MOCVD OF H. Chen, B.M. Yen, G.R.Bai,

Materials Research Society 9800 McKnight Road Pittsburgh, Pennsylvania 15237 Telephone (412) 367-3003 Fax (412) 367-4373 Library of Congress Cataloging in Publication Data Materials Research Society Meeting (1993 : Boston, Mass.). Symposium Y. Metal-organic chemical vapor deposition of electronic ceramics : Symposium Y held on Nov. 29 to Dec. 3, 1993, at Boston, Massachusetts, U.S.A. / editors, Seshu B. Desu, David B. Beach, Bruce W. Wessels, Suleyman Gokoglu. p. cm.-(Materials Research Society symposium ; v. 335) "Presented at the Materials Research Society Fall 1993 ... symposium"-CTP pref. Includes bibliographical references and index. ISBN 1-55899-234-0 I. Electronic ceramics-Congresses. 2. Vapor-plating -Congresses. 3. Thin films- Congresses. I. Desu, Seshu B. II. Beach, David B. III. Wessels, Bruce W. IV. Gokoglu, Suleyman V. Materials Research Society. VI. Title. VII. Series: Materia.ls Research Society Symposium Proceedings ; v. 335. TK7871.15.C4M38 1994 94-5807 621.3815'2-dc20 CTP Manufactured in Jhe United States of America

PREPARATION OF Ba Sr TiO TH CHEMICAL VAPOR D'E°-i§o�mON} S.R. Gilbert, B.W. Wessels, D and C.R. Kannewurf GROWTH OF BaTi03 THIN FILMS 1 Debra L. Kaiser, Mark D. Yau LaWTence H. Robins, and Lawt DONOR-DOPED LEAD ZIRCONATI Seshu B. Desu, Dilip P. Vijay, GROWTH Of (001)-0RIENTED SBN SOURCE MOCVD ... ........ Z.Lu, R.S.Feigelson, R.K. RI VAPOR DEPOSITION OF LITHIUM DOUBLE ALKOXIDE PRECURSO�j Kueir-Weei Chour, Guangde w PAI

RAMAN SPECTRA OF MOCVD-GR THIN FILMS .............. Z.C.Feng, B.S.Kwak, A.Erb *lnvited Paper